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Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. Micro and Nanomanufacturing provides a comprehensive treatment of established micro and nanofabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn about: Manufacturing and fabrication techniques at the micro and nanoscales; Using bulk and surface micromachining techniques, LiGA, and deep x-ray lithography to manufacture semiconductors; Producing master molds with micromachining; The deposition of thin films, pulsed water drop machining, and nanomachining. Provides a thorough knowledge of design and fabrication of nano and micro devices Applies production and research lab techniques to a variety of materials Discusses thin film deposition, pulsed water drop machining and other techniques
INDICE: Principles of Micro- and Nanofabrication. Microfabriaction Using X-Ray Lithography. Manufacturing High Aspect Ration Microstructures. Meso-Micromachining. Mechanical Micromachining. Microgrinding. Diamond Micro Cutting Tools. Laser Micro- and Nanofabrication. Micromachining Using Water Droplets. Diamond Nanogrinding. Nanomachining. Micro-and Nanomanufacturing.
Engineers who want a thorough knowledge of how Nano and Micro devices are designed and fabricated and the myriad number of factors that must be considered when designing and fabricating these devices
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